Your Address : Globalchemmade--Shandong Ruihua Fluoride Industry Co.,Ltd.
Name:Shandong Ruihua Fluoride Industry Co.,Ltd.
Type:Others
Tel:86 530 6233885
Fax:
Address:China(Mainland)
Products detail
| Product Name: | tetrafluoromethane |
|
| CAS No: | 75-73-0 | |
| Product Type: | Inorganic Chemicals -> Others | |
| Product spec: | 99.999% | |
| Packing: | cylinders | |
| Post Time: | 2015-09-01 | |
| Usage: | With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and oxygen mixtures. | |
| Description: | Deion Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas. | |