Your Address : Globalchemmade--Shandong Ruihua Fluoride Industry Co.,Ltd.
Name:Shandong Ruihua Fluoride Industry Co.,Ltd.
Type:Others
Tel:86 530 6233885
Fax:
Address:China(Mainland)
Products detail
| Product Name: | Sulfur Hexafluoride |
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| CAS No: | 2551-62-4 | |
| Product Type: | Inorganic Chemicals -> Others | |
| Product spec: | 99.9%-99.999% | |
| Packing: | cylinders | |
| Post Time: | 2015-09-01 | |
| Usage: | Applications Fluorine source for high density plasma etching: offers high ivity without generating carbon by-products. | |
| Description: | Deion Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas Gas Data Molecular Weight 146.05 Specific Gravity(Air=1) 5.1 Applications Fluorine source for high density plasma etching: offers high ivity without generating carbon by-products. Specifications SF6 Property Unit Minimum Maximum SF6 %vol 99.999 -- O2 ppmv -- 1 N2 ppmv -- 3 CO ppmv -- 0.5 CO2 ppmv -- 1 CF4 ppmv -- 2 H2O ppmv -- 2 HF ppmv -- 0.1 THC(CH4) ppmv -- 1 Package Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L Valve CGA 580 / 590 This is common cylinders sizes.RUIHUA fills customer owned cylinders. Shipping Information DOT Label Green, Nonflammable Gas DOT Class 2.2 CAS No.: 2551-62-4 UN Number 1080 | |